Parts / Governments(West Hall)
| Denso: Micro Electro Mechanical System |
MEMS (Micro Electro Mechanical Systems) are microstructures manufactured on semiconductor wafers by semiconductor process technologies.
DENSO has developed a technology for MEMS having deeper and narrower trench not possible before, and is applying this technology to automotive accelerometer and future products.
Micro prisms under development will be exhibited.
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